The purpose of the Process Flow diagram is to depict all models and mappings related to the process metamodel entity.

Process Flow diagrams show sequential flow of control between activities and may utilize swim-lane techniques to represent ownership and realization of process steps. For example, the application that supports a process step may be shown as a swim-lane.

In addition to showing a sequence of activity, process flows can also be used to detail the controls that apply to a process, the events that trigger or result from completion of a process, and also the products that are generated from process execution.

Process Flow diagrams are useful in elaborating the architecture with subject specialists, as they allow the specialist to describe "how the job is done" for a particular function. Through this process, each process step can become a more fine-grained function and can then in turn be elaborated as a process.